1962
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Roy Gordon is a chemical physicist who has worked on various topics from quantum mechanics to materials science. He is the Thomas D. Cabot Professor of Chemistry and Chemical Biology, Emeritus, and not accepting graduate students.
- Roy Gordon | Gordon Research Group - Harvard University
Roy Gordon. Professor Gordon studied chemical physics at...
- Gordon Research Group - Harvard University
Harvard honors Professor Roy Gordon's legacy with a new...
- Roy G. Gordon | Harvard John A. Paulson School of Engineering and ...
Research Areas. Applied Physics. Materials and Mechanical...
- Roy Gordon | Gordon Research Group - Harvard University
Roy Gordon is a chemical physicist who studies bonding, spectroscopy, intermolecular forces, solid state and materials science. He is the Thomas D. Cabot Professor of Chemistry at Harvard and has made discoveries of new materials and vapor deposition processes.
Harvard honors Professor Roy Gordon's legacy with a new endowed title By Caitlin McDermott-Murphy. Roy Gordon can no longer leave Harvard University.
- • in ALD Films
- List of the Stable Elements by Symbol
- P S
- ALD Materials by Type
- FOR NON-METALS
- PS
- PS
- FORMETALS
- P S
- Disadvantages:
- Elements with Halide ALD Precursors
- N O
- Disadvantages:
- Disadvantages:
- Disadvantages:
- Cd
- Y Z Zr
- Disadvantages:
- Advantages:
- Disadvantages:
- rd
- ALD reactions usually transfer one atom
- Examples of ALD Reactions
- H-reduction reactions => transition metals
- chloride to trialkylsilylreactions => selenides or tellurides
- Oxides by Hydroxyl Exchange & Hydrolysis
- Oxides by Oxidation with Ozone
- O Si
- Nitrides by Chloride Exchange and Reduction
- Noble Metals by Oxidation Reactions
- Problems When the Chemistry is Wrong
- Summary
ALD Precursors for Non-Metals Types of ALD precursors for Metals TypesofALD Reactions ELEMENTS AND MATERIALS
Silver Ag Aluminum Al Argon Ar Arsenic As Gold Au Boron B Barium Ba BlliB Beryllium Be Bromine Br Carbon C CalciumCa Calcium Ca Cadmium Cd Cerium Ce ChlorineCl Cobalt Co Chromium Cr CesiumCs CopperCu Dysprosium Dy Erbium Er Europium EuManganese MnAntimony Sb Fluorine F Iron Fe Gallium Ga Gadolinium G...
Cl KCaScTiVCrMnFeCoNiCuZnGaGeAsSeBrKr RbSrYZrNbMoTcRuRhPdAgCdInSnSbTeIXe Cs Ba La Hf Ta W Re Os Ir Pt Au Hg Tl Pb
Oxide dielectricsAl O , TiO , ZrO , HfO Oxide conductorsor semiconductors
oxygen nitrogen fluorine, carbon sulfur, selenium, tellurium phosphorus, arsenic, antimony
KCaScTiVCrMnFeCoNiCuZnGaGeAs Rb Sr Y Zr Nb Mo Tc Ru Rh Pd Ag Cd In Sn
GaGeAs Se InSnSbTeIXe TlPbBiPoAtRn CePrNdPmSmEuGdTbDyHoErTmYbLu ThPaUNpPuA m C m BkCfEsFmMdLrNo TYPES OF ALD PRECURSORS
pure elements metal hydrides metal halides: luorides, chlorides, bromides, iodides metal-carbon bonds: alkyls, cyclopentadienyls metal-oxygen bonds: alkoxides, beta-diketonates metal-nitrogen bonds: amides, imides, amidinates
Cl GeAsSe RbSrYZrNbMoTcRuRhPdAgCdInSnSbTeIXe s a L a Hf Ta W R e O s IIr Pt u g FrRaAcRfDbSgBhHsMtDsRg Ce Pr Nd Pm Sm Eu Gd Tb
usually need plasma activation pyrophoric and toxic
Halides are compounds of an element M and a halogen X = F, Cl, Br or I
AlSiP KCaSc TiVCrMn FeCoNi CuZnGaGe Rb Sr Y Zr Nb Mo Tc Ru Rh Pd Ag Cd In
halogen impurities in films corrosive byproducts Oxygen can be combined with halide ligands:
some have low reactivity (Ni, Ru) some are solids lid(Ni (Ni, S r, Mg, MIL) In, La) some have low volatility (La, Sr, Mg)
limited thermal stability notsuitableformakingnitrides not suitable for making pure metals
In Sn Sb Te Cs BaLaHf TaW ReOsIrPt AuHgTl Pb BiPoAtRn FrRaAcRfDbSgBhHsMtDsRg Ce Pr Nd Pm SmEuGd Tb DyHoErTm YbLu ThPaUNpPuA m C m BkCfEsFmMdLrNo
Nb M o Tc R u Rh Pd A g Cd I n S n Sb Te CsBa LaHfTaW ReOsIrPtAuHgTl PbBi PoAtRn FrRaAcRfDbSgBhHsMtDsRg Ce Pr NdPmSmEuGdTbDyHoErTmYbLu ThPaUNpPuA m C m BkCfEsFmMdLrNo Advantages:
highly reactive suitable itblfidditid for oxides and nitrides limited thermal stability silicon iliiitfillid impurity from silylamides
high reactivity to water => oxides high reactivity to ammonia => nitrides
several different ligands needed some are solids, not liquids
AlCrGaVTiRuScLuErYGdEuNdPrCeLaBi n existent? Increasing size of metal atom m = more crowded, r = more reactive
from a surface-bound group to a vapor group, or from a vapor group to a surface-bound group (the reverse direction). The transferred atoms are usually hydrogen, oxygen, fluorine or chlorine. Afewreactionstransfera wholegroupofatoms , notjustasingleatom.
water H-transfer reactions => metal oxides ozone O-transfer reactions => metal oxides silanol H-transfer reactions => metal silicates ammonia H -transferreactions=>metalnitrides
oxygen O-transfer reactions => noble metals (Pt, Ru, Ir) fluoride to silicon reactions => tungsten or molybdenum
ethanolamine H-transfer reactions => incorporated organic groups
Ttki(dithlid)hfitithttkhfidiidTetrakis(dimethylamido)hafnium reacts with water to make hafnium dioxide
ALDprecursorsareavailableformostnon-radioactiveelements Suitable reactant pairs are known for ALD of some pure elements oxides of most elements nitrides of many elements sulfides, selenides and telluridesof some elements phosphides and arsenidesof a few elements fluorides of a few elements ALD reactions usually involve exchange reactionsbetween gro...
ALDprecursorsareavailableformostnon-radioactiveelements Suitable reactant pairs are known for ALD of some pure elements oxides of most elements nitrides of many elements sulfides, selenides and telluridesof some elements phosphides and arsenidesof a few elements fluorides of a few elements ALD reactions usually involve exchange reactionsbetween gro...
ALDprecursorsareavailableformostnon-radioactiveelements Suitable reactant pairs are known for ALD of some pure elements oxides of most elements nitrides of many elements sulfides, selenides and telluridesof some elements phosphides and arsenidesof a few elements fluorides of a few elements ALD reactions usually involve exchange reactionsbetween gro...
ALDprecursorsareavailableformostnon-radioactiveelements Suitable reactant pairs are known for ALD of some pure elements oxides of most elements nitrides of many elements sulfides, selenides and telluridesof some elements phosphides and arsenidesof a few elements fluorides of a few elements ALD reactions usually involve exchange reactionsbetween gro...
ALDprecursorsareavailableformostnon-radioactiveelements Suitable reactant pairs are known for ALD of some pure elements oxides of most elements nitrides of many elements sulfides, selenides and telluridesof some elements phosphides and arsenidesof a few elements fluorides of a few elements ALD reactions usually involve exchange reactionsbetween gro...
ALDprecursorsareavailableformostnon-radioactiveelements Suitable reactant pairs are known for ALD of some pure elements oxides of most elements nitrides of many elements sulfides, selenides and telluridesof some elements phosphides and arsenidesof a few elements fluorides of a few elements ALD reactions usually involve exchange reactionsbetween gro...
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Oct 19, 2022 · Research Areas. Applied Physics. Materials and Mechanical Engineering. Science, Technology, Innovation, and Public Policy. Climate, Environment, Industry, Materials, Technology.
Roy GORDON, Professor (Full) | Cited by 32,593 | of Harvard University, MA (Harvard) | Read 451 publications | Contact Roy GORDON
Roy Gordon is a renowned chemist and inventor who has made significant contributions to energy, electronics, and materials science. He has received the Eni Award for Innovation in Energy and the Roy Gerald Gordon Professorship in Chemistry from Harvard University.
